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| Excimer Laser Gase |
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Excimer Laser,
Wavelength
|
Typ |
Gasmix |
| 308 nm |
XeCl |
HCl+H2+He+Xe+Ne |
| 351 nm |
XeF |
F2+He+Xe+Ne |
| 248 nm |
KrF |
F2+He+Kr+Ne |
| 193 nm |
ArF |
F2+He+Ar+Ne |
Information about cylinders
| Type of cylinder |
Bulk, ltr. |
Type of a valves |
| B10 |
10 |
DIN 14, DIN 8 |
| B16 |
16 |
DIN 14, DIN 8 |
| B20 |
20 |
DIN 14, DIN 8 |
| B50 |
50 |
DIN 14, DIN 8 |
|
| Xenon, Xe » |
| Krypton, Kr » |
| Neon, Ne » |
| Helium, He » |
| Argon, Ar » |
| Lasergas, KrNe » |
| Lasergas, ArXeNe » |
| Lasergas, XeNe » |
| Lasergas H2/Neon » |
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