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Octafluorocyclobutane, C4F8 »
OCTAFLUOROCYCLOBUTANE
(C4F8, RC318, Halocarbon 318C)
Name: Octafluorocyclobutane
Symbol: C4F8
CAS ID: 115-25-3
UN Number: UN 1976

Octafluorocyclobutane C4F8 used for plasma etching of some recently developed processes of silicon compounds.


Qualitative performance

OCTAFLUOROCYCLOBUTANE (C4F8, RC318, Halocarbon 318C)
Parameter Measure in Detection limit Critical value
Octafluorocyclobutane
in liquid phase, min.
% vol. 99,999
Nitrogen vppm 0,05 8,0
Oxygen vppm 0,05 2,0
Tetrafluoromethane (CF4) vppm 0,5 1,0
Moisture wppm 0,01 3,0
Acidity as HF wppm 0,01 0,1

Information about cylinders

Type of a cylinder Bulk, litreses Type of a valvees Net weightes, kg
B40 40 DIN 477/6 28
B50 50 DIN 477/6 32


Transport data

Chemical Symbol: C4F8
CAS Registry ID: 115-25-3
Physical properties: A colorless, non-toxic, non-flammable gas
Hazard Class: 2.2
UN Number: UN 1976
Xenon, Xe »
Krypton, Kr »
Neon, Ne »
Helium, He »
Argon, Ar »
Tetrafluoromethane, CF4 »
Sulfur Hexafluoride, SF6 »
Silicon tetrafluoride, SiF4 »
Octafluoropropane, C3F8 »
Propen(Propylen), C3H6 »
Propan, C3H8 »
Butan »
Lasergases »
 
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